High-speed 3D surface measurement with a fringe projection based optical sensor

Christian Bräuer-Burchardt; Stefan Heist; Peter Kühmstedt; Gunther Notni

doi:10.1117/12.2053224

28 May 2014 High-speed 3D surface measurement with a fringe projection based optical sensor

Christian Bräuer-Burchardt, Stefan Heist, Peter Kühmstedt, Gunther Notni

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100E (2014) https://doi.org/10.1117/12.2053224
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

A new optical sensor based on fringe projection technique for the accurate and fast measurement of the surface of objects mainly for industrial inspection tasks is introduced. High-speed fringe projection and image recording with 180 Hz allows 3D rates up to 60 Hz. The high measurement velocity was achieved by consequent fringe code reduction and parallel data processing. Reduction of the image sequence length was obtained by omission of the Gray-code sequence by using the geometric restrictions of the measurement objects. The sensor realizes three different measurement fields between 20 x 20 mm² and 40 x 40 mm² with lateral spatial solutions between 10 μm and 20 μm with the same working distance. Measurement object height extension is between ± 0.5 mm and ± 2 mm. Height resolution between 1 μm and 5 μm can be achieved depending on the properties of the measurement objects. The sensor may be used e.g. for quality inspection of conductor boards or plugs in real-time industrial applications.

Citation Download Citation

Christian Bräuer-Burchardt, Stefan Heist, Peter Kühmstedt, and Gunther Notni "High-speed 3D surface measurement with a fringe projection based optical sensor", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100E (28 May 2014); https://doi.org/10.1117/12.2053224

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KEYWORDS

Sensors

Cameras

3D metrology

Projection systems

Distortion

Calibration

Inspection

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