Linear bolometer array using a high TCR VOx-Au film

Evan M. Smith; James C. Ginn; Andrew P. Warren; Christopher J. Long; Deep Panjwani; Robert E. Peale; David J. Shelton

doi:10.1117/12.2050434

24 June 2014 Linear bolometer array using a high TCR VO_x-Au film

Evan M. Smith, James C. Ginn, Andrew P. Warren, Christopher J. Long, Deep Panjwani, Robert E. Peale, David J. Shelton

Proceedings Volume 9070, Infrared Technology and Applications XL; 90701Z (2014) https://doi.org/10.1117/12.2050434
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

We present a design for a low-noise bolometer linear array based on the temperature-dependent conductivity of a VO_x- Au film. Typical thin film bolometers must compromise between low resistivity to limit Johnson noise and high temperature coefficient of resistivity (TCR) to maximize responsivity. Our vanadium oxide is alloyed with a small concentration of gold by co-sputtering, which gives very low resistivity and very high TCR simultaneously. The film is fabricated on an air bridge device having high thermal conductivity and small thermal time constant optimized for 30 to 60 Hz frame rates. The linear array functions as a low-power profile sensor with a modulated bias. For 1 V bias, we predict responsivity exceeding 1200 V/W. Johnson noise dominates with predicted NEP values as low as 1.0 × 10^-11 W/Hz^1/2. Preliminary device testing shows film resistivity below 2.5 Ω-cm with TCR exceeding -2.0%. Preliminary measurements of NEP and D* are reported.

Citation Download Citation

Evan M. Smith, James C. Ginn, Andrew P. Warren, Christopher J. Long, Deep Panjwani, Robert E. Peale, and David J. Shelton "Linear bolometer array using a high TCR VO_x-Au film", Proc. SPIE 9070, Infrared Technology and Applications XL, 90701Z (24 June 2014); https://doi.org/10.1117/12.2050434

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