Localization concept of re-decomposition area to fix hotspots for LELE process

Yoko Yokoyama; Keishi Sakanushi; Yukihide Kohira; Atsushi Takahashi; Chikaaki Kodama; Satoshi Tanaka; Shigeki Nojima

doi:10.1117/12.2046263

28 March 2014 Localization concept of re-decomposition area to fix hotspots for LELE process

Yoko Yokoyama, Keishi Sakanushi, Yukihide Kohira, Atsushi Takahashi, Chikaaki Kodama, Satoshi Tanaka, Shigeki Nojima

Proceedings Volume 9053, Design-Process-Technology Co-optimization for Manufacturability VIII; 90530V (2014) https://doi.org/10.1117/12.2046263
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Litho-Etch-Litho-Etch (LELE) type double patterning technology (DPT) is known to have an advantage of layout flexibility. However, there are two problems when a hotspot, which is not fixable by tuning OPC, is detected. One is repeating a data preparation flow including decomposition, OPC, and verification by lithography simulation is quite time consuming. The other is a risk to introduce new hotspots at different locations. In this report, a new method to fix hotspots with layout modification of limited area will be presented. The proposed method can reduce not only turnaround time to fix a hotspot but also the number of iterations since it prevents generation of hotspots at new locations.

Citation Download Citation

Yoko Yokoyama, Keishi Sakanushi, Yukihide Kohira, Atsushi Takahashi, Chikaaki Kodama, Satoshi Tanaka, and Shigeki Nojima "Localization concept of re-decomposition area to fix hotspots for LELE process", Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530V (28 March 2014); https://doi.org/10.1117/12.2046263

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available