Reactive ion etching and OES endpoint detection of AlCu thin film

Jun Gou; Hui Ling Tai; Jun Wang; Xiong Bang Wei; Ya Dong Jiang

doi:10.1117/12.2042642

21 December 2013 Reactive ion etching and OES endpoint detection of AlCu thin film

Jun Gou, Hui Ling Tai, Jun Wang, Xiong Bang Wei, Ya Dong Jiang

Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470K (2013) https://doi.org/10.1117/12.2042642
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

Patterning of AlCu alloy thin films is a key technology in MEMS fabrication. In this paper, reactive ion etching (RIE) process of Al-1%Cu films was described using BCl₃ and Cl₂ as etching gases and N₂ and CH₄ as neutral gases. A four-step process was presented to meet the etching requirements using BCl₃, Cl₂, N₂ and CF₄ as process gases. Optical emission spectroscopy (OES) was used to monitor the state of the plasma in real time. The etching endpoint was detected by detecting the spectral intensity change in the wavelength range of 395 ~ 400nm.

Citation Download Citation

Jun Gou, Hui Ling Tai, Jun Wang, Xiong Bang Wei, and Ya Dong Jiang "Reactive ion etching and OES endpoint detection of AlCu thin film", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470K (21 December 2013); https://doi.org/10.1117/12.2042642

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available