Paper
2 June 1988 Novel Stamper Process For Optical Disc
Shinkichi Horigome, Yoshinori Miyamura, Keizo Katou, Masaru Itou, Norio Ohta
Author Affiliations +
Proceedings Volume 0899, Optical Storage Technology and Applications; (1988) https://doi.org/10.1117/12.944614
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
Two new types of stampers have been developed in order to improve the quality of optical discs and to simplify the process for manufacturing stampers. One is a plastic stamper which consists of a PMMA substrate and a photo-polymer resin layer having fine patterns such as pits and grooves on its surface. The other is a quartz stamper which has the pits and grooves with different depth formed on the surface of the quartz substrate by reactive ion etching process. Both these stampers can be made in a short processing time, and their quality is found to be higher than that of the conventional one. These stampers are transparent for ultraviolet light, so that they may also be used for making a replica disc with non-transparent substrate such as an Al substrate.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shinkichi Horigome, Yoshinori Miyamura, Keizo Katou, Masaru Itou, and Norio Ohta "Novel Stamper Process For Optical Disc", Proc. SPIE 0899, Optical Storage Technology and Applications, (2 June 1988); https://doi.org/10.1117/12.944614
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CITATIONS
Cited by 3 patents.
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KEYWORDS
Quartz

Photoresist materials

Glasses

Optical discs

Etching

Manufacturing

Reactive ion etching

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