Paper
7 March 2014 Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings
Jan Grahmann, André Merten, Ralf Ostendorf, Michael Fontenot, Daniela Bleh, Harald Schenk, Hans-Joachim Wagner
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Abstract
In situ process information in the chemical, pharmaceutical or food industry as well as emission monitoring, sensitive trace detection and biological sensing applications would increasingly rely on MIR-spectroscopic anal­ysis in the 3 μm - 12 μm wavelength range. However, cost effective, portable, low power consuming and fast spectrometers with a wide tuning range are not available so far. To provide these MIR-spectrometer properties, the combination of quantum cascade lasers with a MOEMS scanning grating as wavelength selective element in the external cavity is addressed to provide a very compact and fast tunable laser source for spectroscopic analysis.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Grahmann, André Merten, Ralf Ostendorf, Michael Fontenot, Daniela Bleh, Harald Schenk, and Hans-Joachim Wagner "Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897708 (7 March 2014); https://doi.org/10.1117/12.2039950
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Cited by 8 scholarly publications and 1 patent.
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KEYWORDS
Mirrors

Quantum cascade lasers

Microopto electromechanical systems

Etching

Silicon

Chemical analysis

Collimation

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