Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8975, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 8975", Proc. SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, 897501 (24 March 2014); https://doi.org/10.1117/12.2062762
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KEYWORDS
Microelectromechanical systems

Packaging

Reliability

Indium oxide

Current controlled current source

Fluorine

Nanomaterials

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