Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid

Pierre Lorenz; Sarah Zehnder; Martin Ehrhardt; Frank Frost; Klaus Zimmer; Patrick Schwaller

doi:10.1117/12.2037614

6 March 2014 Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid

Pierre Lorenz, Sarah Zehnder, Martin Ehrhardt, Frank Frost, Klaus Zimmer, Patrick Schwaller

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670A (2014) https://doi.org/10.1117/12.2037614
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

Cost-efficient machining of dielectric surfaces with high-precision and low-roughness for industrial applications is still challenging if using laser-patterning processes. Laser induced back side wet etching (LIBWE) using UV laser pulses with liquid heavy metals or aromatic hydrocarbons as absorber allows the fabrication of well-defined, nm precise, free-form surfaces with low surface roughness, e.g., needed for optical applications. The copper-sulphatebased absorber CuSO₄/K-Na-Tartrate/NaOH/formaldehyde in water is used for laser-induced deposition of copper. If this absorber can also be used as precursor for laser-induced ablation, promising industrial applications combining surface structuring and deposition within the same setup could be possible. The etching results applying a KrF excimer (248 nm, 25 ns) and a Nd:YAG (1064 nm, 20 ns) laser are compared. The topography of the etched surfaces were analyzed by scanning electron microscopy (SEM), white light interferometry (WLI) as well as laser scanning microscopy (LSM). The chemical composition of the irradiated surface was studied by energy-dispersive X-ray spectroscopy (EDX) and Fourier transform infrared spectroscopy (FT-IR). For the discussion of the etching mechanism the laser-induced heating was simulated with finite element method (FEM). The results indicate that the UV and IR radiation allows micro structuring of fused silica with the copper-based absorber where the etching process can be explained by the laser-induced formation of a copper-based absorber layer.

Citation Download Citation

Pierre Lorenz, Sarah Zehnder, Martin Ehrhardt, Frank Frost, Klaus Zimmer, and Patrick Schwaller "Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670A (6 March 2014); https://doi.org/10.1117/12.2037614

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