Optimizing the thermal budget for forming of nickel germanide on crystalline germanium

F. Algahtani; M. Blackford; E. Pirogova; A. S. Holland

doi:10.1117/12.2034001

7 December 2013 Optimizing the thermal budget for forming of nickel germanide on crystalline germanium

F. Algahtani, M. Blackford, E. Pirogova, A. S. Holland

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89235A (2013) https://doi.org/10.1117/12.2034001
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

Nickel germanide is used as a contact material in germanium devices for making low resistance electrical contacts. It forms at relatively low temperatures compared to other germanides. Metal thickness, reaction temperature and duration of temperature are critical parameters. Here we report on the minimum temperature of formation of nickel germanide and on the effect of duration of temperature. Nickel germanide forms rapidly at higher temperatures and more slowly at lower temperatures and below a critical temperature it does not form, for any duration.

Citation Download Citation

F. Algahtani, M. Blackford, E. Pirogova, and A. S. Holland "Optimizing the thermal budget for forming of nickel germanide on crystalline germanium", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89235A (7 December 2013); https://doi.org/10.1117/12.2034001

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available