Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena A. Ekwińska; Piotr Kunicki; Tomasz Piasecki; Paweł Janus; Krzysztof Domański; Tomasz Bieniek; Piotr Grabiec; Teodor Gotszalk

doi:10.1117/12.2031093

25 July 2013 Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena A. Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, Teodor Gotszalk

Author Affiliations +

Proceedings Volume 8902, Electron Technology Conference 2013; 89021X (2013) https://doi.org/10.1117/12.2031093
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

Increased interest in micro-and nano-electromechanical systems (MEMS and NEMS) entail the development of reliable measurement techniques for the basic parameters of the designed and manufactured devices. The proposed methodology should provide high resolution, wide frequency range and the possibility to investigate both mechanical and electrical parameters during inspection process. In this article authors present methods for manufacturing of electrostatic MEMS devices. Measurement techniques will be presented for specifying parameters such as resonant frequency, quality factor and sensitivity of the previously manufactured structures. Manufacturing techniques will be presented on the example of the micropusher structure, whereas measurement techniques will be presented on the example of the microgripper structure.

Citation Download Citation

Magdalena A. Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, and Teodor Gotszalk "Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures ", Proc. SPIE 8902, Electron Technology Conference 2013, 89021X (25 July 2013); https://doi.org/10.1117/12.2031093

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