Engineering optical constants for broadband single layer antireflection coatings

S. P. Huber; R. W. E. van de Kruijs; A. E. Yakshin; E. Zoethout; F. Bijkerk

doi:10.1117/12.2026546

27 September 2013 Engineering optical constants for broadband single layer antireflection coatings

S. P. Huber, R. W. E. van de Kruijs, A. E. Yakshin, E. Zoethout, F. Bijkerk

Author Affiliations +

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 884814 (2013) https://doi.org/10.1117/12.2026546
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We developed and fabricated a single layer antireflection coating for the molybdenum/silicon multilayer mirrors.The 20 nm thin film of Si_0.52C_0.16N_0.29, deposited by simultaneous electron beam evaporation and nitrogen ion implantation, causes a broadband suppression of the DUV reflectance with a maximum suppression at λ= 285 nm from 58% to 0.3%, corresponding to a factor of 195.

Citation Download Citation

S. P. Huber, R. W. E. van de Kruijs, A. E. Yakshin, E. Zoethout, and F. Bijkerk "Engineering optical constants for broadband single layer antireflection coatings", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 884814 (27 September 2013); https://doi.org/10.1117/12.2026546

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