Using fiber optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer

Woohyun Jung; Jongki Kim; Hang-Eun Joe; Byung-Kwon Min; Kyunghwan Oh

doi:10.1117/12.2024634

6 September 2013 Using fiber optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer

Woohyun Jung, Jongki Kim, Hang-Eun Joe, Byung-Kwon Min, Kyunghwan Oh

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 88390C (2013) https://doi.org/10.1117/12.2024634
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Photoluminescence is one of the methods used for analyzing the optical characteristics of materials. For components in solid-state lighting such as GaN-based LEDs, the use of an LED structure configuration on a patterned sapphire substrate has shown to be highly effective in improving light-extraction efficiency. We proposed a compact and simple photoluminescence measurement system based on fiber-optic probes that can be scanned over a 20 × 20 μm² area with a high spatial resolution. We applied the system in morphological study of InGaN/GaN epitaxial layers for LED applications. With this system, we obtained peak intensity, peak wavelength, and full width at half maximum of the emission spectrum.

Citation Download Citation

Woohyun Jung, Jongki Kim, Hang-Eun Joe, Byung-Kwon Min, and Kyunghwan Oh "Using fiber optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390C (6 September 2013); https://doi.org/10.1117/12.2024634

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