Optical testing with computer generated holograms: comprehensive error analysis

Chunyu Zhao; James H. Burge

doi:10.1117/12.2024742

7 September 2013 Optical testing with computer generated holograms: comprehensive error analysis

Chunyu Zhao, James H. Burge

Proceedings Volume 8838, Optical Manufacturing and Testing X; 88380H (2013) https://doi.org/10.1117/12.2024742
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Interferometry with computer generated holograms (CGHs) has become the industry standard for accurate measurements of aspheric optical surfaces. The CGH is a diffractive optical element that can be designed to create virtually any phase or amplitude distribution, and can be accurately manufactured using methods and equipment developed for integrated circuit production. Surface measurements with nanometer level precision can be performed using accurately wellcalibrated equipment. This paper provides a systematic analysis of all significant sources of error for CGH metrology, including encoding error, pattern distortion, substrate irregularity and calibration, and system alignment.

Citation Download Citation

Chunyu Zhao and James H. Burge "Optical testing with computer generated holograms: comprehensive error analysis", Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380H (7 September 2013); https://doi.org/10.1117/12.2024742

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available