Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films

Yongqiang Hou; Hongji Qi; Xu Li; Kai He; Ming Fang; Kui Yi; Jianda Shao

doi:10.1117/12.2020147

9 July 2013 Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films

Yongqiang Hou, Hongji Qi, Xu Li, Kai He, Ming Fang, Kui Yi, Jianda Shao

Proceedings Volume 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers; 87861W (2013) https://doi.org/10.1117/12.2020147
Event: SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, 2013, Shanghai, China

Abstract

On the basis of theoretical analysis of biaxial birefringent thin films, this study investigates the optical properties of phase shift on reflection and/or transmission through slanted columnar TiO₂ sculptured anisotropic thin film (ATF) deposited with glancing angle deposition (GLAD) technique via reactive electron-beam evaporation. The tilted nanocolumn microstructures of thin film induce the optical anisotropy. The optical constants dispersion equations of TiO₂ ATF are determined from fitting the transmittance spectra for s- and p-polarized waves measured at normal and oblique incidence within 400-1200nm. With the extracted structure parameters, the phase shifts of polarized light are analyzed with the characteristic matrix and then measured with spectroscopic ellipsometry in the deposition plane. A reasonably good agreement between the theoretical studies and experimental measurements is obtained. In addition, the dependence of the phase shift on oblique incidence angle is also discussed. The results show a greater generality and superiority of the characteristic matrix method. Birefringence of the biaxial ATF performed a sophisticated phase modulation with varied incidence angles over a broad range to have a wide-angle phase shift.

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Yongqiang Hou, Hongji Qi, Xu Li, Kai He, Ming Fang, Kui Yi, and Jianda Shao "Optical properties of phase shift on reflection and/or transmission through biaxial anisotropic thin films", Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 87861W (9 July 2013); https://doi.org/10.1117/12.2020147

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KEYWORDS

Phase shifts

Thin films

Titanium dioxide

Reflection

Transmittance

Birefringence

Refractive index

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