Shortening of the process chain by tactile inline measurement

Lutz Doering; Nicole Thronicke; Christian Löbner; Thomas Frank; Steffen Reich; Stefan Völlmeke; Arndt Steinke

doi:10.1117/12.2017853

17 May 2013 Shortening of the process chain by tactile inline measurement

Lutz Doering, Nicole Thronicke, Christian Löbner, Thomas Frank, Steffen Reich, Stefan Völlmeke, Arndt Steinke

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87632V (2013) https://doi.org/10.1117/12.2017853
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

This article describes the application of a microelectromechanical system (MEMS) with a beam-shaped cantilever and an integrated piezo-resistive measuring bridge. This device is used for a quick inline control of building panels, which consist of different materials (e.g. metals, polymers and elastomers). The micro sensing device distinguishes itself by a comparatively very low probing force (<100 μN), a high natural frequency (<2.7 kHz) and a very small mass (≈ 0.1 mg). Measuring speeds up to approx. 10 mm/s can be realized. In addition, this sensor comes with a typical resolution in vertical displacement of 2 nm (due to noise floor Δf = 1,6 kHz).

Citation Download Citation

Lutz Doering, Nicole Thronicke, Christian Löbner, Thomas Frank, Steffen Reich, Stefan Völlmeke, and Arndt Steinke "Shortening of the process chain by tactile inline measurement", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632V (17 May 2013); https://doi.org/10.1117/12.2017853

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