Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint

Nan Liu; Peng Jin; Jiubin Tan

doi:10.1117/12.2015118

31 January 2013 Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint

Nan Liu, Peng Jin, Jiubin Tan

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875951 (2013) https://doi.org/10.1117/12.2015118
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Micro lens array used in parallel laser direct writing process is fabricated with UV imprinting and dry etching. Experiment results show that the relief of fabrication result is confirmed with that of original stamp. And the optical character test experiments show that the focused spot array under both writing laser and focusing test laser is similar. And the single spot profile under both writing laser and focusing test laser is also similar.

Citation Download Citation

Nan Liu, Peng Jin, and Jiubin Tan "Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875951 (31 January 2013); https://doi.org/10.1117/12.2015118

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