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31 January 2013 Three-dimensional surface measurement by amplified off-axis digital holography
Wu You, Xiaojun Liu, Wenlong Lu, Liping Zhou
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875928 (2013) https://doi.org/10.1117/12.2014790
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
A new optical configuration for amplified off-axis digital holographic microscopy is presented and applied to surface measurement. By symmetrical configurations in the optical path, aberration compensation for phase curvature can be avoided in the reconstructed process. Three dimensional surface texture of a grating plate is reconstructed via a single hologram and its parameters are verified.
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Wu You, Xiaojun Liu, Wenlong Lu, and Liping Zhou "Three-dimensional surface measurement by amplified off-axis digital holography", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875928 (31 January 2013); https://doi.org/10.1117/12.2014790
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KEYWORDS
Digital holography
Holograms
Microscopy
Holography
3D image reconstruction
3D metrology
Light emitting diodes
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