New silicon technologies enable high-performance arrays of single photon avalanche diodes

Angelo Gulinatti; Ivan Rech; Piera Maccagnani; Sergio Cova; Massimo Ghioni

doi:10.1117/12.2016384

29 May 2013 New silicon technologies enable high-performance arrays of single photon avalanche diodes

Angelo Gulinatti, Ivan Rech, Piera Maccagnani, Sergio Cova, Massimo Ghioni

Proceedings Volume 8727, Advanced Photon Counting Techniques VII; 87270M (2013) https://doi.org/10.1117/12.2016384
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency at the longer wavelengths (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we will analyze the factors the currently prevent the fabrication of arrays of SPADs by adopting such a Red-Enhanced (RE) technology and we will propose further modifications to the device structure that will enable the fabrication of high performance RE-SPAD arrays for photon timing applications.

Citation Download Citation

Angelo Gulinatti, Ivan Rech, Piera Maccagnani, Sergio Cova, and Massimo Ghioni "New silicon technologies enable high-performance arrays of single photon avalanche diodes", Proc. SPIE 8727, Advanced Photon Counting Techniques VII, 87270M (29 May 2013); https://doi.org/10.1117/12.2016384

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