Low frequency/high sensitivity triaxial monolithic sensor

F. Acernese; R. Canonico; R. De Rosa; G. Giordano; R. Romano; F. Barone

doi:10.1117/12.2008630

19 April 2013 Low frequency/high sensitivity triaxial monolithic sensor

F. Acernese, R. Canonico, R. De Rosa, G. Giordano, R. Romano, F. Barone

Proceedings Volume 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013; 86923H (2013) https://doi.org/10.1117/12.2008630
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

This paper describes a new mechanical implementation of a triaxial sensor, configurable as seismometer and/or as accelerometer, consisting of three one-dimensional monolithic FP sensors, suitably geometrically positioned. The triaxial sensor is, therefore, compact, light, scalable, tunable instrument (frequency < 100 mHz with large band (10⁻⁷ Hz − 10 Hz), high quality factor (Q < 1500 in air) with good immunity to environmental noises, guaranteed by an integrated laser optical readout. The measured sensitivity curve is in very good agreement with the theoretical ones (10⁻¹²m/√Hz) in the band (0.1 ÷ 10Hz). Typical applications are in the field of earthquake engineering, geophysics, civil engineering and in all applications requiring large band-low frequency performances coupled with high sensitivities.

Citation Download Citation

F. Acernese, R. Canonico, R. De Rosa, G. Giordano, R. Romano, and F. Barone "Low frequency/high sensitivity triaxial monolithic sensor", Proc. SPIE 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013, 86923H (19 April 2013); https://doi.org/10.1117/12.2008630

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