3D lithography for implant applications

Jens Schneider; Henning Feick; Dieter Kaiser; Marcel Heller; Daniel Sarlette

doi:10.1117/12.2008444

29 March 2013 3D lithography for implant applications

Jens Schneider, Henning Feick, Dieter Kaiser, Marcel Heller, Daniel Sarlette

Proceedings Volume 8683, Optical Microlithography XXVI; 86831P (2013) https://doi.org/10.1117/12.2008444
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In this paper we describe an approach for the realization of 3D resist patterns for implant applications, highlighting the opportunities of controlling doping depth and profiles and their influence on device parameters. We choose a grayscale litho process, where the 3D structuring of the photoresist is done by a spatially variable exposure. Pixilated grayscale mask structures are defined to achieve the desired 3D resist patterns by locally variable transmittance values. The variable transmittance values result in different resist film thicknesses after development. Up to 20 different resist film thicknesses are obtained within a single exposure shot. This enables spatial patterning of the implant depth and accordingly various novel approaches for device optimization.

Citation Download Citation

Jens Schneider, Henning Feick, Dieter Kaiser, Marcel Heller, and Daniel Sarlette "3D lithography for implant applications", Proc. SPIE 8683, Optical Microlithography XXVI, 86831P (29 March 2013); https://doi.org/10.1117/12.2008444

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available