Hybrid approach to optical CD metrology of directed self-assembly lithography

Stephane Godny; Masafumi Asano; Akiko Kawamoto; Koichi Wakamoto; Kazuto Matsuki; Cornel Bozdog; Matthew Sendelbach; Igor Turovets; Ronen Urenski; Renan Milo

doi:10.1117/12.2012660

10 April 2013 Hybrid approach to optical CD metrology of directed self-assembly lithography

Stephane Godny, Masafumi Asano, Akiko Kawamoto, Koichi Wakamoto, Kazuto Matsuki, Cornel Bozdog, Matthew Sendelbach, Igor Turovets, Ronen Urenski, Renan Milo

Author Affiliations +

Proceedings Volume 8681, Metrology, Inspection, and Process Control for Microlithography XXVII; 86812D (2013) https://doi.org/10.1117/12.2012660
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Directed Self Assembly (DSA) for contact layers is a challenging process in need of reliable metrology for tight process control. Key parameters of interest are guide CD, polymer CD, and residual polymer thickness at the bottom of the guide cavity. We show that Optical CD (OCD) provides the needed performance for DSA contact metrology. The measurement, done with a multi-channel spectroscopic reflectometry (SR) system, is enhanced through elements of a Holistic Metrology approach such as Injection and Hybrid Metrology.

Citation Download Citation

Stephane Godny, Masafumi Asano, Akiko Kawamoto, Koichi Wakamoto, Kazuto Matsuki, Cornel Bozdog, Matthew Sendelbach, Igor Turovets, Ronen Urenski, and Renan Milo "Hybrid approach to optical CD metrology of directed self-assembly lithography", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 86812D (10 April 2013); https://doi.org/10.1117/12.2012660

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available