Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror

M. Nakahama; H. Sano; S. Inoue; A. Matsutani; T. Sakaguchi; F. Koyama

doi:10.1117/12.2003698

13 March 2013 Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror

M. Nakahama, H. Sano, S. Inoue, A. Matsutani, T. Sakaguchi, F. Koyama

Author Affiliations +

Proceedings Volume 8639, Vertical-Cavity Surface-Emitting Lasers XVII; 86390F (2013) https://doi.org/10.1117/12.2003698
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We demonstrate a giant wavelength-temperature dependence of wavelength of a micromachined 850nm VCSEL with a thermally actuated metal/semiconductor cantilever mirror. The modeling shows a possibility of giant temperature dependence of wavelength of several nm/K, which is determined by cantilever length and metal thickness. The fabricated 850nm VCSEL exhibits a temperature dependence of -1.6 nm/K, and a wavelength tuning of 35 nm in 850 nm band was obtained by changing the device temperature by 12K. In addition, electro-thermal tuning was demonstrated using integrated micro heater. Continuous wavelength shift of 15 nm was obtained with heating power of 40 mW.

Citation Download Citation

M. Nakahama, H. Sano, S. Inoue, A. Matsutani, T. Sakaguchi, and F. Koyama "Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390F (13 March 2013); https://doi.org/10.1117/12.2003698

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available