Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices

Harish Subbaraman; Xiaochuan Xu; John Covey; Ray T. Chen

doi:10.1117/12.2004707

27 February 2013 Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices

Harish Subbaraman, Xiaochuan Xu, John Covey, Ray T. Chen

Author Affiliations +

Proceedings Volume 8630, Optoelectronic Interconnects XIII; 86301C (2013) https://doi.org/10.1117/12.2004707
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We demonstrate efficient coupling of light into silicon nanomembrane (SiNM) based photonic devices using a subwavelength grating (SWG) coupler. Our designed 17.1 μm x 10 μm grating couplers are fabricated at the input and the output of 8 mm x 2.5 μm SiNM waveguides on a glass substrate. A high coupling efficiency of 39.2% is achieved at a wavelength of 1555.56 nm. The 1-dB and 3-dB bandwidths are measured to be 29 nm and 57 nm, respectively. Peak efficiency variation of 0.26 dB is observed from a measurement of 5 grating pairs. Such grating couplers open limitless possibilities for the development of high performance nanomembrane based photonic devices.

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Harish Subbaraman, Xiaochuan Xu, John Covey, and Ray T. Chen "Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices", Proc. SPIE 8630, Optoelectronic Interconnects XIII, 86301C (27 February 2013); https://doi.org/10.1117/12.2004707

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