Low-loss high-speed silicon Mach-Zehnder modulator for optical-fiber telecommunications

Kensuke Ogawa; Kazuhiro Goi; Hiroyuki Kusaka; Yoshihiro Terada; Tsung-Yang Liow; Xiaoguang Tu; Guo-Qiang Lo; Dim-Lee Kwong; Vivek Dixit; Soon Thor Lim; Ching Eng Png

doi:10.1117/12.2002311

14 March 2013 Low-loss high-speed silicon Mach-Zehnder modulator for optical-fiber telecommunications

Kensuke Ogawa, Kazuhiro Goi, Hiroyuki Kusaka, Yoshihiro Terada, Tsung-Yang Liow, Xiaoguang Tu, Guo-Qiang Lo, Dim-Lee Kwong, Vivek Dixit, Soon Thor Lim, Ching Eng Png

Author Affiliations +

Proceedings Volume 8629, Silicon Photonics VIII; 86290U (2013) https://doi.org/10.1117/12.2002311
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Low-loss high-speed traveling-wave silicon Mach-Zehnder modulator with reduced series resistance is studied in microwave and optical measurements. Microwave impedance and propagation loss under reverse bias are characterized by S-parameter measurements. Resonant loss due to series inductance-resistance-capacitance coupling limits microwave performances of the traveling-wave modulator. High-speed optical performances are characterized, based on eyediagram measurements in on-off keying at 10-32 Gb/s and constellation and eye-diagram measurements in differential phase-shift keying at 20 Gb/s. Dispersion tolerance in error-free transmission in 10-Gb/s on-off keying and 20-Gb/s differential phase-shift keying is obtained as +/-950 ps/nm and +/-220 ps/nm, respectively by path-penalty measurements. Transmission performance in 10-Gbps on-off keying is comparable with lithium niobate Mach-Zehnder modulator.

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Kensuke Ogawa, Kazuhiro Goi, Hiroyuki Kusaka, Yoshihiro Terada, Tsung-Yang Liow, Xiaoguang Tu, Guo-Qiang Lo, Dim-Lee Kwong, Vivek Dixit, Soon Thor Lim, and Ching Eng Png "Low-loss high-speed silicon Mach-Zehnder modulator for optical-fiber telecommunications", Proc. SPIE 8629, Silicon Photonics VIII, 86290U (14 March 2013); https://doi.org/10.1117/12.2002311

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