Reliability of MEM relays for zero leakage logic

Yenhao Chen; Rhesa Nathanael; Jack Yaung; Louis Hutin; Tsu-Jae King Liu

doi:10.1117/12.2005719

9 March 2013 Reliability of MEM relays for zero leakage logic

Yenhao Chen, Rhesa Nathanael, Jack Yaung, Louis Hutin, Tsu-Jae King Liu

Proceedings Volume 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII; 861404 (2013) https://doi.org/10.1117/12.2005719
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Micro-electro-mechanical (MEM) relays are an intriguing alternative to transistors for ultra-low-power digital logic applications [1]. This paper investigates various failure modes for logic relays. Experimental results are presented to show that structural fatigue, dielectric charging, and contact stiction are not reliability-limiting issues. Contact resistance instability caused by surface oxidation and contamination is the primary challenge, and can be influenced by device design and operating conditions.

Citation Download Citation

Yenhao Chen, Rhesa Nathanael, Jack Yaung, Louis Hutin, and Tsu-Jae King Liu "Reliability of MEM relays for zero leakage logic", Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 861404 (9 March 2013); https://doi.org/10.1117/12.2005719

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