Based on the method of subaperture splicing detection on spherical

Weirui Zhao; Zhengnan Liang; Guangyu Pan

doi:10.1117/12.999814

26 November 2012 Based on the method of subaperture splicing detection on spherical

Weirui Zhao, Zhengnan Liang, Guangyu Pan

Proceedings Volume 8557, Optical Design and Testing V; 85571S (2012) https://doi.org/10.1117/12.999814
Event: Photonics Asia, 2012, Beijing, China

Abstract

This thesis studies the stitching interferometry of large aperture optical aspheric surface. Analyzing the data of the adjacent two sub apertures overlap by using SIFT algorithm, we obtained the stitching parameters between the sub-aperture and the overall surface information of the inspected mirror. We wrote the interference graph solution phase program, Zernike fitting program, stitching test program, and completed the principle experiment. We have given the compare results of stitching and full caliber testing, the RMS deviation of the two kinds of method is less than 2nm.

Citation Download Citation

Weirui Zhao, Zhengnan Liang, and Guangyu Pan "Based on the method of subaperture splicing detection on spherical", Proc. SPIE 8557, Optical Design and Testing V, 85571S (26 November 2012); https://doi.org/10.1117/12.999814

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