Determination of failure mechanisms for AlN-based microcantilevers with use of Twyman-Green interferometry

Christophe Gorecki

doi:10.1117/12.932225

13 September 2012 Determination of failure mechanisms for AlN-based microcantilevers with use of Twyman-Green interferometry

Christophe Gorecki

Author Affiliations +

Proceedings Volume 8494, Interferometry XVI: Applications; 84940T (2012) https://doi.org/10.1117/12.932225
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

MEMS devices are exposed to a variety of environmental effects, making a prediction of operational reliability difficult. Here, we investigate environmental effects on properties of piezoelectrically actuated microcantilevers, where AlN is used as actuation material. The environmental effects to be considered include thermal and humid cycling, as well as harsh electrical loading performed under normal conditions. Investigated properties are defined for the static and dynamic behavior of microcantilevers. A Twyman-Green interferometer, operating in both stroboscopic regime and time-average interferometry mode, is used as a metrology tool. Monitoring the micromechanical behaviors of devices driven by AlN during the lifetime tests assists monitoring of their long-term stability. FEM calculation is also used to further explain various failure mechanisms.

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Christophe Gorecki "Determination of failure mechanisms for AlN-based microcantilevers with use of Twyman-Green interferometry", Proc. SPIE 8494, Interferometry XVI: Applications, 84940T (13 September 2012); https://doi.org/10.1117/12.932225

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