Er- and Nd-implanted MOS light emitting devices and their use for integrated photonic applications

L. Rebohle; R. Wutzler; S. Germer; J. Lehmann; M. Helm; W. Skorupa

doi:10.1117/12.921755

10 May 2012 Er- and Nd-implanted MOS light emitting devices and their use for integrated photonic applications

L. Rebohle, R. Wutzler, S. Germer, J. Lehmann, M. Helm, W. Skorupa

Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 843116 (2012) https://doi.org/10.1117/12.921755
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

In the past, the suitability of Er for Si-based light emission was already investigated in detail. However, much less attention has been paid to Nd with its main electroluminescence (EL) line around 900 nm. In this study we compare the electrical and EL properties of Er- and Nd-implanted metal-oxide-semiconductor (MOS) structures where the dielectric stack is composed of the implanted SiO₂ layer and a SiON buffer layer. Regarding the EL, the EL spectrum, the EL decay time and the EL efficiency were measured. The electrical characterization comprises current-voltage and capacitance-voltage measurements. Although the EL efficiency of Nd-implanted devices is by a factor of 5 to 10 lower than that of Er-based, the emission wavelength of Nd has some advantages compared to that of Er. Finally, based on these results the suitability of these two types of light emitters for integrated photonic devices is discussed.

Citation Download Citation

L. Rebohle, R. Wutzler, S. Germer, J. Lehmann, M. Helm, and W. Skorupa "Er- and Nd-implanted MOS light emitting devices and their use for integrated photonic applications", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843116 (10 May 2012); https://doi.org/10.1117/12.921755

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available