Lifetime prediction in vacuum packaged MEMS provided with integrated getter film

Fabrizio Siviero; Antonio Bonucci; Andrea Conte; Marco Moraja; Olivier Gigan; Isabelle Thomas

doi:10.1117/12.920566

31 May 2012 Lifetime prediction in vacuum packaged MEMS provided with integrated getter film

Fabrizio Siviero, Antonio Bonucci, Andrea Conte, Marco Moraja, Olivier Gigan, Isabelle Thomas

Proceedings Volume 8353, Infrared Technology and Applications XXXVIII; 83533C (2012) https://doi.org/10.1117/12.920566
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

Thin-film getter integration is one of the key technologies enabling the development of a wide class of MEMS devices, such as IR microbolometers and inertial sensors, where stringent vacuum requirements must be satisfied to achieve the desired performances and preserve them for the entire lifetime. Despite its importance, the question about lifetime prediction is still very difficult to answer in a reliable way. Here we present an experimental approach to the evaluation of lifetime, based on an accelerated life test performed varying both the storage conditions and the getter area. A test vehicle based on a resonator device was used. The hermeticity was evaluated by means of specific leak testing, while MEMS behavior during the ageing test was studied monitoring device functional parameters and by residual gas analysis (RGA). Unexpected results were observed leading to the discovery that methane is pumped by the getter below 100°C. These results served as the inputs of a suitable model allowing extrapolating the device lifetime in operating? conditions, and pointed out that RGA is an essential tool to correctly interpret the aging tests.

Citation Download Citation

Fabrizio Siviero, Antonio Bonucci, Andrea Conte, Marco Moraja, Olivier Gigan, and Isabelle Thomas "Lifetime prediction in vacuum packaged MEMS provided with integrated getter film", Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83533C (31 May 2012); https://doi.org/10.1117/12.920566

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available