Paper
30 March 2012 New technologies for large-scale micropatterning of functional nanocomposite polymers
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Abstract
We present a review of different micropatterning technologies for flexible elastomeric functional nanocomposites with a particular emphasis on mold material and processes for production of large size substrates. The functional polymers include electrically conducting and magnetic materials developed at the Micro-instrumentation Laboratory at Simon Fraser University, Canada. We present a chart that compares many of these different conductive and magnetic functional nanocomposites and their measured characteristics. Furthermore, we have previously reported hybrid processes for nanocomposite polymers micromolded against SU-8 photoepoxy masters. However, SU-8 is typically limited to substrate sizes that are compatible with microelectronics processing as a microelectronics uv-patterning step is typically involved, and de-molding problems are observed. Recently, we have developed new processes that address the problems faced with SU-8 molds. These new technologies for micropatterning nanocomposites involve new substrate materials. A low cost Poly(methyl methacrylate) (PMMA) microfabrication technology has been developed, which involves fabrication of micromold via either CO2 laser ablation or deep UV. We have previously reported this large-scale patterning technique using laser ablation. Finally, we compare the two processes for PMMA producing micromolds for nanocomposites.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Khosla and B. L. Gray "New technologies for large-scale micropatterning of functional nanocomposite polymers", Proc. SPIE 8344, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2012, 83440W (30 March 2012); https://doi.org/10.1117/12.915178
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Polymethylmethacrylate

Nanocomposites

Carbon dioxide lasers

Polymers

Deep ultraviolet

Laser ablation

Etching

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