Thickness-aware LFD for the hotspot detection induced by topology

Jae-Hyun Kang; Naya Ha; Joo-Hyun Park; Byung-Moo Kim; Seung Weon Paek; Hungbok Choi; Kee Sup Kim; Ahmed Mohy; Shady Abdelwahed; Mohamed Imam

doi:10.1117/12.917998

14 March 2012 Thickness-aware LFD for the hotspot detection induced by topology

Jae-Hyun Kang, Naya Ha, Joo-Hyun Park, Byung-Moo Kim, Seung Weon Paek, Hungbok Choi, Kee Sup Kim, Ahmed Mohy, Shady Abdelwahed, Mohamed Imam

Author Affiliations +

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 83270P (2012) https://doi.org/10.1117/12.917998
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

As a result, low fidelity patterns due to process variations can be detected and eventually corrected by designers as early in the tape out flow as right after design rule checking (DRC); a step no longer capable to totally account for process constraints anymore. This flow has proven to provide a more adequate level of accuracy when correlating systematic defects as seen on wafer with those identified through LFD simulations. However, at the 32nm and below, still distorted patterns caused by process variation are unavoidable. And, given the current state of the defect inspection metrology tools, these pattern failures are becoming more challenging to detect. In the framework of this paper, a methodology of advanced process window simulations with awareness of chip topology is presented. This method identifies the expected focal range different areas within a design would encounter due to different topology.

Citation Download Citation

Jae-Hyun Kang, Naya Ha, Joo-Hyun Park, Byung-Moo Kim, Seung Weon Paek, Hungbok Choi, Kee Sup Kim, Ahmed Mohy, Shady Abdelwahed, and Mohamed Imam "Thickness-aware LFD for the hotspot detection induced by topology", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270P (14 March 2012); https://doi.org/10.1117/12.917998

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available