Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment

M. Kaestner; I. W. Rangelow

doi:10.1117/12.916263

21 March 2012 Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment

M. Kaestner, I. W. Rangelow

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83231G (2012) https://doi.org/10.1117/12.916263
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

To keep on with scaling down of nanoelectronic components novel lithographic approaches are required. The direct, positive-tone lithography of calixarene molecular resists by scanning probe techniques represents a promising alternative for ease-of-use sub-10 nm mask-less lithography. Herein, we demonstrate a closed loop tip-based nanolithography using the same nanoprobe for: (i) AFM pre-imaging for pattern overlay alignment; (ii) direct writing of features into calixarene molecular resist applying a highly confined, development-less removal process; and (iii) AFM post-imaging as final in-situ inspection. In addition, we demonstrate parallel writing capabilities by employing multi nano-tip probes. By using these methods we can drastically enhance the attractiveness of calixarene molecular resist as development-less, high resolution resist material for Scanning Probe Lithography (SPL).

Citation Download Citation

M. Kaestner and I. W. Rangelow "Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231G (21 March 2012); https://doi.org/10.1117/12.916263

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE