Modeling the ion beam target interaction to reduce defects generated by ion beam deposition

Thomas Cardinal; Daniel Andruczyk; He Yu; Vibhu Jindal; Patrick Kearney; David N. Ruzic

doi:10.1117/12.916878

23 March 2012 Modeling the ion beam target interaction to reduce defects generated by ion beam deposition

Thomas Cardinal, Daniel Andruczyk, He Yu, Vibhu Jindal, Patrick Kearney, David N. Ruzic

Proceedings Volume 8322, Extreme Ultraviolet (EUV) Lithography III; 83222Q (2012) https://doi.org/10.1117/12.916878
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The defectivity of extreme ultraviolet (EUV) mask blanks is a critical issue in EUV lithography. It has been observed that target surfaces can develop many formations that generate defects during ion beam sputtering. Two simulation models were developed to study the surface morphology and evolution of a target surface under different ion beam conditions. Extensive simulations were performed to understand the interaction of the ion beam with the target surface. The modeling was able to mimic the growth and the elimination of these formations through normal incidence bombardment as verified by ion beam sputtering experiments.

Citation Download Citation

Thomas Cardinal, Daniel Andruczyk, He Yu, Vibhu Jindal, Patrick Kearney, and David N. Ruzic "Modeling the ion beam target interaction to reduce defects generated by ion beam deposition", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 83222Q (23 March 2012); https://doi.org/10.1117/12.916878

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available