Self-calibration method of two-dimensional grid plate

Guoqing Ding; Xin Chen; Lihua Wang; Lihua Lei; Yuan Li

doi:10.1117/12.903923

15 November 2011 Self-calibration method of two-dimensional grid plate

Guoqing Ding, Xin Chen, Lihua Wang, Lihua Lei, Yuan Li

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210Y (2011) https://doi.org/10.1117/12.903923
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

A two-dimensional grid plate can offer an X-Y position standard where grids are aligned orthogonal to each other. It is important to ensure the positional accuracy of the grid plate when the grid plate is used to calibrate planar movement systems, such as vision measuring machines and scanning probe microscopes. Existing algorithms for self-calibration employ the discrete Fourier transform, which is complicated and has poor noise suppression capability. We have developed an algorithm that can achieve exact self-calibration for a two-dimensional grid plate using the least squares method when there is no random noise. In the presence of random noise, the algorithm still presents an excellent capability for noise suppression. As an extension of the classic three-location measurement, the algorithm can be applied to four- or five-location measurements, which reduce measurement uncertainties. The error propagation characteristic of the random errors has been investigated in the case of different measurement strategies. According to the simulation results, the mean error propagation ratios are less than 1 when the array size of the grid plate is less than 32×32. Finally, the influence of the scale errors of the planar movement system is discussed.

Citation Download Citation

Guoqing Ding, Xin Chen, Lihua Wang, Lihua Lei, and Yuan Li "Self-calibration method of two-dimensional grid plate", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210Y (15 November 2011); https://doi.org/10.1117/12.903923

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