Rigorous electromagnetic analysis of metallic cylindrical focusing micromirrors designed by a modified focal-length function

Guo-Ai Mei; Jiasheng Ye; Yan Zhang

doi:10.1117/12.903890

15 November 2011 Rigorous electromagnetic analysis of metallic cylindrical focusing micromirrors designed by a modified focal-length function

Guo-Ai Mei, Jiasheng Ye, Yan Zhang

Author Affiliations +

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210U (2011) https://doi.org/10.1117/12.903890
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

Through exploiting a modified focal-length function, two-dimensional metallic cylindrical focusing micromirrors (MCFMs) with different preset focal depths are designed. Rigorous electromagnetic theory and the boundary element method are applied to analyzing the focal characteristics, including the actual focal depth, the relative focal depth, the focal spot size and the diffraction efficiency. Through setting the preset focal depth to be positive or negative, numerical results reveal that the designed MCFMs can successfully modulate the optical field distribution to achieve a long axial focal depth or increased lateral resolution, respectively. In addition, due to the inherent achromatic aberration property of the metallic reflective system, the common long-focal-depth region of the designed MCFM under multiwavelength illumination is greatly enlarged, in comparison with a dielectrically cylindrical microlens. It is expected that the designed MCFMs should have many practical applications in micro optics systems.

Citation Download Citation

Guo-Ai Mei, Jiasheng Ye, and Yan Zhang "Rigorous electromagnetic analysis of metallic cylindrical focusing micromirrors designed by a modified focal-length function", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210U (15 November 2011); https://doi.org/10.1117/12.903890

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