Comparison of picosecond and femtosecond laser ablation for surface engraving of metals and semiconductors

John Lopez; Rainer Kling; Rémi Torres; Anne Lidolff; Martin Delaigue; Sandrine Ricaud; Clemens Hönninger; Eric Mottay

doi:10.1117/12.907792

15 February 2012 Comparison of picosecond and femtosecond laser ablation for surface engraving of metals and semiconductors

John Lopez, Rainer Kling, Rémi Torres, Anne Lidolff, Martin Delaigue, Sandrine Ricaud, Clemens Hönninger, Eric Mottay

Author Affiliations +

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82430O (2012) https://doi.org/10.1117/12.907792
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

In order to minimize thermal load to the workpiece pico- and femtosecond lasers gain an increasing market share in industrial applications such as surface structuring or thin film selective ablation. Due to nonlinear absorption they are capable to process any type of material (dielectrics, semiconductors, metals) and provide an outstanding quality suppressing heat affects on the workpiece. In this paper, we report on results about surface engraving of metals (Al, Cu, Mo, Ni), semiconductor (Si) and polymer (PC) using a picosecond thin disk Yb:YAG-amplifier, which could be used in the picosecond regime as well as in the femtosecond regime by simply changing the seed laser source. In the picosecond regime the oscillator pulses, ranging from 10 to 34ps, can be directly amplified which leads to a quite simple and efficient amplifier architecture. On the other hand, a broadband femtosecond oscillator and a CPA configuration can be used in order to obtain pulse duration down to 900fs. We compare these results to recently obtained achievements using commercial femtosecond lasers based on Yb-doped crystals and fibers and operating at comparable output power levels, up to 15Watt. Finally, we have considered etch rate and process efficiency for both ps- and fs-regimes as a function of average power, of fluence and of intensity.

Citation Download Citation

John Lopez, Rainer Kling, Rémi Torres, Anne Lidolff, Martin Delaigue, Sandrine Ricaud, Clemens Hönninger, and Eric Mottay "Comparison of picosecond and femtosecond laser ablation for surface engraving of metals and semiconductors", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430O (15 February 2012); https://doi.org/10.1117/12.907792

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