Optical properties of square-aperture planar microlens array

Jie Chen; Fengjun Zhang; Xiaomei Chen; Zhifang Zhao; Sumei Zhou; Xiaoping Jiang; Desen Liu

doi:10.1117/12.901030

8 September 2011 Optical properties of square-aperture planar microlens array

Jie Chen, Fengjun Zhang, Xiaomei Chen, Zhifang Zhao, Sumei Zhou, Xiaoping Jiang, Desen Liu

Author Affiliations +

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 819123 (2011) https://doi.org/10.1117/12.901030
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

In this part, to improve fill factor of microlens array, we designed a new type of square-aperture planar microlens array which is used for collecting and transferring optical information efficiently. By lithographic ion-exchange and a special technology to remove the 1.0 micron layer of titanium on the glass substrate, square-aperture planar microlens array is buried in the substrate and the fill factor of microlens array are larger than 98%. Each microlens unit of the array is square and has an aperture size of 0.2mm with the excellent capabilities of external stress and temperature. At last, many optical feature parameters of square-aperture planar microlens array are tested and analyzed, and the experimental results show that good performance can be used farther in studies and tests later.

Citation Download Citation

Jie Chen, Fengjun Zhang, Xiaomei Chen, Zhifang Zhao, Sumei Zhou, Xiaoping Jiang, and Desen Liu "Optical properties of square-aperture planar microlens array", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819123 (8 September 2011); https://doi.org/10.1117/12.901030

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KEYWORDS

Microlens array

Refractive index

Microlens

Near field optics

Glasses

Lithography

Near field scanning optical microscopy

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