Secrets of subwavelength imaging and lithography

Philip R. Hemmer

doi:10.1117/12.894581

13 September 2011 Secrets of subwavelength imaging and lithography

Philip R. Hemmer

Proceedings Volume 8163, Quantum Communications and Quantum Imaging IX; 816303 (2011) https://doi.org/10.1117/12.894581
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

To understand the limits and tradeoffs of nearly all existing subwavelength imaging techniques it sufficient to understand magnetic resonance imaging (MRI) and its generalizations. In many cases, subwavelength optical lithography can be viewed as the inverse problem to imaging and so the same principles apply. A simple review of MRI is given which shows how the most popular subwavelength imaging and lithography techniques naturally arise as special cases.

Citation Download Citation

Philip R. Hemmer "Secrets of subwavelength imaging and lithography", Proc. SPIE 8163, Quantum Communications and Quantum Imaging IX, 816303 (13 September 2011); https://doi.org/10.1117/12.894581

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available