Interferometric Testing At Perkin-Elmer

D. R. Eastman

doi:10.1117/12.941768

23 March 1987 Interferometric Testing At Perkin-Elmer

D. R. Eastman

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941768
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Interferometric metrology is used in a number of different modes at Perkin-Elmer. In addition to its wide application of evaluating optical surfaces for figure it is also used to determine the inhomogeneity of optical materials, examine the polishability of surfaces in terms of surface roughness, determine the mechanical and thermal stability of materials and aid in the assembly of optical systems. There is installed a large base of conventional interferometers to perform these metrology operations. Many have been designed and built to measure very specific optical components.

Citation Download Citation

D. R. Eastman "Interferometric Testing At Perkin-Elmer", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941768

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