Extended range metrology: an age old problem

Catherine E. Towers; David P. Towers; K. Falaggis

doi:10.1117/12.893283

3 June 2011 Extended range metrology: an age old problem

Catherine E. Towers, David P. Towers, K. Falaggis

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821P (2011) https://doi.org/10.1117/12.893283
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Interferometric metrology is well established for both single point and full field measurements. However, absolute techniques for long range measurements, spanning 100's to 10,000's of fringe orders whilst maintaining sub-fringe resolution have been reported with widely varying levels of performance. In this paper, techniques for long range multi-wavelength interferometry are reviewed with respect to applications of classical interferometry and fringe projection profilometry. Whilst hierarchical geometric series methods provide a potential solution it is shown that significantly greater freedom in wavelength selection is obtained by applying excess fraction principles and a new predictive model for this technique is discussed.

Citation Download Citation

Catherine E. Towers, David P. Towers, and K. Falaggis "Extended range metrology: an age old problem", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821P (3 June 2011); https://doi.org/10.1117/12.893283

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