Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff; A. Frank; M. Lenzhofer; M. Wildenhain; T. Sandner; A. Kenda

doi:10.1117/12.886481

5 May 2011 Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660O (2011) https://doi.org/10.1117/12.886481
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

We have developed compact devices comprising optical position sensing and driver electronics with closed loop control, capable of driving resonant 1D- and 2D-MOEMS scanner mirrors. Position encoding is realized by measuring a laser beam reflected from the backside of the mirror. In the 2D-device we use cylindrical mirrors in order to suppress the deflection of the orthogonal dimension. This reduces the problem to the control of two independent 1D-oscillations and allows accurate position sensing. The phase between the oscillations of the two orthogonal axes is actively controlled to achieve a stable Lissajous figure. In this contribution we also demonstrate that this approach is scalable for synchronization of separate MEMS mirrors.

Citation Download Citation

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, and A. Kenda "Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660O (5 May 2011); https://doi.org/10.1117/12.886481

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