Creating nanohole arrays with the helium ion microscope

Mohan Ananth; Lewis Stern; David Ferranti; Chuong Huynh; John Notte; Larry Scipioni; Colin Sanford; Bill Thompson

doi:10.1117/12.887497

1 June 2011 Creating nanohole arrays with the helium ion microscope

Mohan Ananth, Lewis Stern, David Ferranti, Chuong Huynh, John Notte, Larry Scipioni, Colin Sanford, Bill Thompson

Proceedings Volume 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 80360M (2011) https://doi.org/10.1117/12.887497
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Helium Ion Microscopy has been established as a powerful imaging technique offering unique contrast and high resolution surface information. More recently, the helium ion beam has been used for nanostructuring applications similar to a gallium focused ion beam. A key difference between helium and gallium induced sputtering is the less intense damage cascade which lends this technique to precise and controlled milling of different materials enabling applications. The helium ion beam has been used for drilling 5nm holes in a 100nm gold foil (20:1 aspect ratio) while the gallium beam sputtered holes of a similar aspect ratio seem to be limited to a 50nm hole size. This paper explores the drilling of nanopores in gold films and other materials and offers an explanation for the observed differences in results between helium and gallium ions.

Citation Download Citation

Mohan Ananth, Lewis Stern, David Ferranti, Chuong Huynh, John Notte, Larry Scipioni, Colin Sanford, and Bill Thompson "Creating nanohole arrays with the helium ion microscope", Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 80360M (1 June 2011); https://doi.org/10.1117/12.887497

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