Design, fabrication, and evaluation of on-chip micro-supercapacitors

Majid Beidaghi; Wei Chen; Chunlei Wang

doi:10.1117/12.884350

17 May 2011 Design, fabrication, and evaluation of on-chip micro-supercapacitors

Majid Beidaghi, Wei Chen, Chunlei Wang

Proceedings Volume 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II; 80350J (2011) https://doi.org/10.1117/12.884350
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

Citation Download Citation

Majid Beidaghi, Wei Chen, and Chunlei Wang "Design, fabrication, and evaluation of on-chip micro-supercapacitors", Proc. SPIE 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II, 80350J (17 May 2011); https://doi.org/10.1117/12.884350

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