Fabrication of gratings and optical diffractive elements on chalcogenide thin films

Vadims Kolbjonoks; Vjaceslavs Gerbreders; Janis Teteris; Andrejs Bulanovs

doi:10.1117/12.892173

26 July 2011 Fabrication of gratings and optical diffractive elements on chalcogenide thin films

Vadims Kolbjonoks, Vjaceslavs Gerbreders, Janis Teteris, Andrejs Bulanovs

Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 80012P (2011) https://doi.org/10.1117/12.892173
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal

Abstract

The electron beam (EB) induced changes in solubility of thin As-S-Se films have been studied. Optimal absorption current choice, nano structure relief and shape dependence on acceleration voltage discussed. The possibilities of practical use of these materials as resist for gratings and optical diffractive element production using EB. New results are presented that indicate chalcogenide glasses as promising electron beam resists.

Citation Download Citation

Vadims Kolbjonoks, Vjaceslavs Gerbreders, Janis Teteris, and Andrejs Bulanovs "Fabrication of gratings and optical diffractive elements on chalcogenide thin films", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 80012P (26 July 2011); https://doi.org/10.1117/12.892173

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