Quantification of the difference between two sources by Zernike polynomial decomposition

C. Alleaume; E. Yesilada; V. Farys; Y. Trouiller

doi:10.1117/12.881779

5 April 2011 Quantification of the difference between two sources by Zernike polynomial decomposition

C. Alleaume, E. Yesilada, V. Farys, Y. Trouiller

Proceedings Volume 7973, Optical Microlithography XXIV; 79731Y (2011) https://doi.org/10.1117/12.881779
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Source Mask Optimization (SMO) technique is an advanced resolution enhancement technique with the goal of extending optical lithography lifetime by enabling low k1 imaging [1,2]. On that purpose, an appropriate source and mask duo can be optimized for a given design. SMO can yield freeform sources that can be realized to a good accuracy with optical systems such as the FlexRay [3],. However, it had been showen that even the smallest modification of the source can impact the wafer image or the process.[4] Therefore, the pupil has to be qualified, in order to measure the impact of any source deformation[5]. In this study we will introduce a new way to qualify the difference between sources, based on a Zernike polynomial decomposition [6]. Such a method can have several applications: from quantifying the scanner to scanner pupil difference, to comparing the source variation depending of the SMO settings etc. The straighforward Zernike polynomial decomposition allow us to identify some classic optical issues like coma or lens aberration.

Citation Download Citation

C. Alleaume, E. Yesilada, V. Farys, and Y. Trouiller "Quantification of the difference between two sources by Zernike polynomial decomposition", Proc. SPIE 7973, Optical Microlithography XXIV, 79731Y (5 April 2011); https://doi.org/10.1117/12.881779

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available