Photoinitiated polymerization of new hybrid monomer containing vinyl ether and (methyl) acryloyl groups

Cuimei Diao; Yingquan Zou

doi:10.1117/12.879382

15 April 2011 Photoinitiated polymerization of new hybrid monomer containing vinyl ether and (methyl) acryloyl groups

Cuimei Diao, Yingquan Zou

Proceedings Volume 7972, Advances in Resist Materials and Processing Technology XXVIII; 79721R (2011) https://doi.org/10.1117/12.879382
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The photopolymerization kinetics of 4-(vinyloxy)butyl methacrylate containing cationic and free radical polymerizable vinyl groups was studied by real-time Fourier transform infrared spectra (RT-FTIR) .The cationic polymerizable vinyl ether moieties(Vc) of the hybrid monomer in solution polymerized rapidly by exposure to UV light in presence of a cationic photoinitiator such as an iodonium salt or suflonium salt .High conversions, of 90%, were obtained for most of the systems investigated. The efficiency of the cationic photoinitiators in initiating the polymerization of the vinyl ether moieties (Vc) of the hybrid monomer was in the order: suflonium salt > iodonium salt . The free radical polymerizable methacrylate groups (Vr) of the hybrid monomer in solution polymerized by exposure to UV light in presence of a radical photoinitiator such as 2,4,6-trimethyl benzoyl diphenylphoshine oxide (TPO), 2-isopropyl thioxanthone (ITX) , Phenylbis(2,4,6-trimethylbenzoyl)phosphine oxide (Irgaure 819), 2-Methyl-4'-(methylthio)-2-morpholinopropiophenone (Irgaure 907). Among the photoinitiators , the best effect in initiating the polymerization of methacrylate groups (Vr) of the hybrid monomer is initiator Irgaure 907.

Citation Download Citation

Cuimei Diao and Yingquan Zou "Photoinitiated polymerization of new hybrid monomer containing vinyl ether and (methyl) acryloyl groups", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79721R (15 April 2011); https://doi.org/10.1117/12.879382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available