Characteristics of main chain decomposable STAR polymer for EUV resist

Jun Iwashita; Taku Hirayama; Isamu Takagi; Kensuke Matsuzawa; Kenta Suzuki; Sachiko Yoshizawa; Kenri Konno; Masahito Yahagi; Kazufumi Sato; Seiichi Tagawa; Kazuyuki Enomoto; Akihiro Oshima

doi:10.1117/12.879349

15 April 2011 Characteristics of main chain decomposable STAR polymer for EUV resist

Jun Iwashita, Taku Hirayama, Isamu Takagi, Kensuke Matsuzawa, Kenta Suzuki, Sachiko Yoshizawa, Kenri Konno, Masahito Yahagi, Kazufumi Sato, Seiichi Tagawa, Kazuyuki Enomoto, Akihiro Oshima

Author Affiliations +

Proceedings Volume 7972, Advances in Resist Materials and Processing Technology XXVIII; 79720L (2011) https://doi.org/10.1117/12.879349
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The concept of nonlinear acid diffusion coefficient would be emphasized to achieve better latent image quality, resulting in better lithographic performance. Focusing on realizing the concept, we previously reported about a main chain decomposable star shaped polymer (STAR polymer).STAR polymer consists of a core unit and several arm units which connect to the core unit with easily acid cleavable bonding. (Fig.1) The main chain decomposition system is ideal to achieve promoted acid diffusion at exposed area because it accompanies great molecular weight reduction at exposed area. The significance of the STAR system had been confirmed for partially protected poly(p-hydroxystyrene) (PHS) considering arm length and core structure. Employing p-hydroxy-α-methylstylene (PHOMS) for arm structure, novel STAR polymer with appropriate glass transition temperature (T_g) could be realized. (Fig.2) Poly PHOMS is known to undergo acid-catalyzed decomposition from the polymer end. Lithographic performance comparison between the STAR polymer and the linear polymer as a control using a Micro Exposure Tool (MET) would be exhibited. Thermal property change with exposure and dissolution charactersitic will be also discussed. Moreover main chain decomposition mechanism was investigated with flood EB irradiation.

Citation Download Citation

Jun Iwashita, Taku Hirayama, Isamu Takagi, Kensuke Matsuzawa, Kenta Suzuki, Sachiko Yoshizawa, Kenri Konno, Masahito Yahagi, Kazufumi Sato, Seiichi Tagawa, Kazuyuki Enomoto, and Akihiro Oshima "Characteristics of main chain decomposable STAR polymer for EUV resist", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79720L (15 April 2011); https://doi.org/10.1117/12.879349

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available