An improved focus control mirror using SU-8 wafer bonding process

Mohammad J. Moghimi; B. Jeffery Lutzenberger; Kyle Oliver; Steven Gates; Xiaohu Xue; Brant Kaylor; David L. Dickensheets

doi:10.1117/12.876672

14 February 2011 An improved focus control mirror using SU-8 wafer bonding process

Mohammad J. Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, David L. Dickensheets

Author Affiliations +

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 793005 (2011) https://doi.org/10.1117/12.876672
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.

Citation Download Citation

Mohammad J. Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, and David L. Dickensheets "An improved focus control mirror using SU-8 wafer bonding process", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793005 (14 February 2011); https://doi.org/10.1117/12.876672

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