Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer

Yasuhiro Mizutani; Tetsuo Iwata; Yukitoshi Otani

doi:10.1117/12.871749

11 November 2010 Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer

Yasuhiro Mizutani, Tetsuo Iwata, Yukitoshi Otani

Author Affiliations +

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550N (2010) https://doi.org/10.1117/12.871749
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

We propose a measurement method of vibrational surface profile for an ultrasonic motor (USM) using a stroboscopic oblique incidence interferometer. A time-dependent behaviors of the stator, one of the main components of the USM, is of considerable practical interest for development of new devices. owever it is difficult to observe its surface profile because there are diffused and vibrational surface. An obliquely incident light would offer advantage of the diffused surface because of higher reflectance. Furthermore, for detecting interferences at the vibrational surface profile, a modulated light source is synchronized with electrical signals of the USM. We are successful to detect a vibrational surface of the stator.

Citation Download Citation

Yasuhiro Mizutani, Tetsuo Iwata, and Yukitoshi Otani "Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550N (11 November 2010); https://doi.org/10.1117/12.871749

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