Mechanical stress sensors using micromachined grating fibers

Hironori Kumazaki; Munehiro Hiramatsu; Hisakazu Oguri; Seiki Inaba; Kazuhiro Hane

doi:10.1117/12.882857

18 May 2011 Mechanical stress sensors using micromachined grating fibers

Hironori Kumazaki, Munehiro Hiramatsu, Hisakazu Oguri, Seiki Inaba, Kazuhiro Hane

Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775394 (2011) https://doi.org/10.1117/12.882857
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada

Abstract

We discuss mechanical stress sensors based on fiber Bragg gratings (FBGs) micromachined by anisotropic reactive ion etching (RIE) using CF₄ plasma. Locally thinned FBGs have the potential to be used as sensitive strain sensors whose sensitivities increase with decreasing measurement range. The center reflection wavelength shift rate of an etched and thinned grating (thinned grating length: 2.0 mm; thinned diameter: 15 μm; total grating length: 10.0 mm) was approximately 15 times greater than that of a conventional unprocessed FBG. The difference in the center reflection wavelengths of thinned and unetched grating regions could be used to counteract changes in the surrounding temperature. On the other hand, a single FBG with an asymmetrical cross section can detect the degree of curvature and the bending direction. The center reflection wavelength shifted by 0.4 nm at 1550 nm on bending that imparted a radius of curvature of ±127 mm.

Citation Download Citation

Hironori Kumazaki, Munehiro Hiramatsu, Hisakazu Oguri, Seiki Inaba, and Kazuhiro Hane "Mechanical stress sensors using micromachined grating fibers", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775394 (18 May 2011); https://doi.org/10.1117/12.882857

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